Specialty Optical Fabrication Technologies for Microdevices and Sensors
本讲教师：ZHANG A. Ping
Abstract： The rapid development of microsystems and nanoengineering has increased the demand for advanced microfabrication technologies. Here, we introduce two kinds of specialty optical fabrication technologies and their applications on the development of functional microdevices and sensors. Firstly, phase-mask assisted laser scanning technologies with high-power UV pulses are demonstrated to fabricate high-quality fiber grating devices. Recent advances on fiber grating applications, including fiber Bragg grating hot-wire anemometers and phase-shifted long-period grating filters for tunable mode locking, will be presented. Secondly, optical maskless exposure technologies with relatively low-power UV sources are demonstrated to directly print polymer microdevices and sensors. Optical 3D μ-printing of polymer optical whispering-gallery-mode resonators and in-situ optical printing of fiber-based microcavity sensors will be presented. Moreover, optofluidic printing of in-channel thermally controllable microvalves is demonstrated for lab-on-a-chip applications. Biosketch： Dr. Zhang received the BSc and MSc degrees from Zhejiang University (ZJU) in 1997 and 2000, respectively, and received his PhD degree from The Hong Kong Polytechnic University (PolyU) in 2003. He started his academic career in ZJU as Lecturer in 2003, and promoted as Associate Professor of Optical Engineering in 2005. He was a Research Scholar of the Institute for Lasers, Photonics, and Biophotonics, State University of New-York at Buffalo (UB) during the period of 2006–2008, and the Department of NanoEngineering of University of California, San Diego (UCSD) in 2011, respectively. He then joined the Department of Electrical Engineering of The Hong Kong Polytechnic University as Associate Professor in 2012. His research interests include optical micro-/nano-fabrication, devices and sensors.